Semicon Services

The Varian PVD

Introduction

Semicon Services was started in 1993 to specifically service and support the Varian 3000 series sputter systems. We designed and developed a number of enhancements to the original tools including the shutter interlock chassis, Kilowatt Hr chassis and Recipe controlled heater chassis. We have extensive experience in the supply, refurbishment, upgrade, installation, commissioning and service support of the Varian 3000 series with many "blue chip" customers around the world. In addition we carry spares for the Varian M2000 and M2i Cluster tools and can offer service support for these systems if required.

Varian 3000 Series 3180/3190/3280/3290
We can supply a 3000 series to your specific requirements. Once you tell us what wafer size and options are required we can build the system for you around those requirements. Here are some of the options you can specify :-
	ECS control system or Standard Fluke 1722A control system
	RF Etch
	VIPS (Vacuum Isolated Processing Station)
	Load Lock Turbo
	On board cryo
	Ferro fluidic co-axial seal
	Water Pump
	SMC Utility Box
	Particle Reduction Kit

Examples of Refurbished 3190 systems with optional ECS 3000 Control system