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| Upgrades
- ECS 3000 Control System |
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This upgrade comprises of a PC and touch screen together
with a new Master Interconnect Chassis which replaces
the now obsolete Fluke 1722A controller, Wafer Process
controller, Wafer Loader controller, Ion gauge controller,
Thermocouple gauge controller and Convectron gauge controller |
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The
ECS software operates through a user friendly touch screen
interface and can be Equipped with the SECS II interface
to enable upload and download of data to a host computer |
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This upgrade significantly reduces the potential for electronic
failures and at the same time brings the control system
right up to date with on screen menu’s, history
logging, maintenance functions and recipe control. |
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This upgrade requires a recipe controlled heater chassis,
Varian Multigauge and later style Interlock and control
chassis. These can be supplied if required. |
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The
ECS can be configured to accept Quantum, Mini Quantum,
Conmag I or Conmag II sources and can be interfaced with
any of the sputtering power supplies used on Varian 3000
systems. |
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Target
life is monitored and the user can set alarm and warning
limits. Retrofit time is 3 days. |
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This
upgrade cannot be fitted to 3280 systems and early systems
having the 110 VAC utility box. (unless either the Varian
24 VDC or SMC utility box is retrofitted) |
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It
should be noted that the multi pass option is not available
within the ECS software. |
| Recipe
controlled heater chassis - Eurotherm 808
digital temperature controllers for improved temperature
stability |
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By using a Semicon Services Recipe Controlled Heater Chassis
featuring Eurotherm 808 digital temperature controllers,
you can help eliminate miss-processed wafers |
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Improved
temperature stability, combined with automated temperature
control ensures no process is started until every station
is within the tolerances defined by your recipe. |
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This is available for three or four stations machines.
The heater chassis is connected with an RS422 serial link
from your existing Fluke 1722. |
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If you currently have Fluke 1720’s, we offer an
exchange program to allow you to upgrade to 1722’s |
| Shutter
interlock chassis - Eliminates crescents on wafers
by monitoring shutter position and creates an interlock
in the event of jamming, sticking or slow shutter movement |
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The current design of the shutters on the 3000 series
allows wafers to be processed when the shutters are jammed
open or closed. |
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We have designed a retrofit, which monitors the position
of the shutters, and in the event of an error, creates
an interlock to prevent miss-processed or scrapped wafers.
This is achieved by creating a “source out of regulation”
interlock on the Fluke controller and can only be reset
using a key switch on the front panel. |
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Three
dual coloured LED’s identify the shutter at fault
and an audible alarm will also sound. |
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Potentiometers
on the internal PCB allow selection of time delay between
0.5 and 3.0 seconds before creating the interlock which
allows for slow shutter movement when appropriate. |
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This
upgrade also features counters which log shutter movements,
and can only be reset using the keyswitch. |
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This
assists in determining your preventative maintenance schedules,
as well as target life, more accurately. |
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| Remote
con-mag monitor chassis - Predicts end of target
life by accurately calculating KILOWATT HOURS. Pre-set
KILOWATT HOUR values for alarm activation |
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This retrofit upgrade is designed to replace the remote
Con-Mag meters which are fitted as standard to your Varian
3000 series |
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It will accurately monitor the voltage, current, kilowatts,
and accumulated kilowatt hours of up to three installed
targets. |
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This
replaces the inaccurate meters which are subject to incorrect
readings due to static electricity surface charging. |
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The
Remote Con-Mag Monitor overcomes the historic difficulty
in predicting end of target life by accurately counting
elapsed kilowatt hours giving predictable target utilisation. |
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For
inlayed targets such as platinum, the ability to accurately
measure kilowatt hours removes the possibility of sputtering
through the target material into the copper base. |
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Should
you be sputtering precious metals such as gold, the ability
to monitor actual usage of the target materials results
in greater security and wafer cost management. |
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On
reaching the end of target life, the operator is alerted
by both audible and visual alarms. |
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In
addition to this we offer the option of a process interlock. |
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These
features are can only be reset by a keyswitch on the front
panel |
Wafer
size conversion kits
Wafer size conversion kits are available for all 3000
systems. For the 3180/90 we offer 4” and 5”
kits and for the 3290 4”,5” and 6” kits
are available. |
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In addition 5” and 6” kits are available for
the 3280. Both DC Bias and non DC Bias heaters can be
supplied. It is recommended that a tool audit be carried
out to establish the exact conversion kit requirements
since this will depend on the options fitted |
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The kits can be installed by our Team of experienced Engineers
thereby minimising the downtime on your tool. |
| SMC
replacement pneumatic Utility Box |
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This replaces the existing mechanical utility box
and can be retrofitted in place of both the 24 Volt
DC Utility box and the early type 110 Volt AC utility
box. |
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It eliminates the Humphrey, Alkon and Numatics valves
replacing them with the latest type SMC valves. |
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Fitment
of this box enables early systems to be upgraded
with the ECS 3000 control system. |
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