Varian
Spares - We have a $4M inventory of spares, if you don't see what you need,
contact us
Refurbished Sputter
Sources
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Semicon
offer repair and refurbishment of all the sputter sources used on the 3000
systems including Quantum, Mini-Quantum, Conmag 1 and Conmag II. Customer
sources can be sent for evaluation and repair or exchanged for rebuilt tested
units. All sources are dynamically tested with targets in a dedicated rig prior
to despatch in addition to helium leak testing. All refurbished units carry a
90 day warranty.
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| Fluke
Controllers |
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Both the 1720A and
1722A Fluke controllers are available. Customers can send their own unit back
for evaluation and repair or exchange the faulty unit for a refurbished and
tested one. Semicon can also supply parts for both types and upgrade 1722A
units with extra memory or serial cards as required. All units are tested with
the correct software in a dedicated rig containing a wafer process controller,
a wafer loader controller and a Fluke DVM prior to despatch.
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| 3000
series Controllers |
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Semicon
offer repair and refurbishment of all the controllers used in the 3000 series
including the wafer loader, wafer process, cassette Motor, MKS, Ion Gauge, RF
Etch and vacuum system controllers. Customers can send their own unit back for
evaluation and repair or exchange the faulty unit for a refurbished and tested
one. |
| Sputtering
Power Supplies |
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Semicon
offer repair and refurbishment of all the Varian sputtering power supplies used
in the 3000 series as well as the Advanced Energy MDX-10 Supplies. Customers
can send their own units back for evaluation and repair or exchange the faulty
unit for a refurbished and tested one. All units are thoroughly tested up to
maximum rated output prior to despatch. For the Varian water cooled power
supplies we can offer a reliability upgrade to improve the performance of these
units. |
| Firing
modules |
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Original
The original firing modules have long been obsolete. Customers can send back
their own units for evaluation and repair or exchange their faulty units for a
refurbished and tested one. All refurbished units are tested to maximum output
in a dedicated rig. Replacement Semicon have developed a
replacement firing module which uses readily available components. This
comprises of a control module and a separate Thyristor module. A minor change
also has to be made to the Varian power control board in the power supply. If
desired a modified power control board can be sent with the replacement firing
module and the original board returned. The replacement firing module has been
fully tested and found to give equivalent performance to the original type. |
| RF
generators |
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Semicon
offer repair and refurbishment of all RF generators used on the Varian 3000
series including the RFPP HFS/1000, RF 7 ,RF 10, RF5S and RF10S. Customers can
send their own units back for evaluation and repair or exchange the faulty unit
for a refurbished and Tested one. All units are thoroughly tested up to the
maximum rated output prior to despatch.
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| Wafer
handling
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Many parts
for the Wafer Handler are available ex stock including elevator blades,
Switches, sensors, cassette chains (standard and low particle) and actuators
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| O
rings
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Any
individual O ring for the 3000 series can be supplied or we can supply O rings
in kits such as a 12 month PM O ring kit, Load Lock Kit or System kit.
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| Screw
kits |
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Any
individual screw for the 3000 series can be supplied or we can supply the
screws in kits such as a Target change kit, 12 month PM Kit etc |
| Shields |
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We
keep many of the commonly used shields in stock. Please request a quote. For
larger quantities we can fabricate shields to meet or exceed the original
specification.
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| Water
flow sensors |
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Upgraded
sensors with brass housings are available. These are not prone to cracking if
the fittings are over tightened unlike the standard plastic type. The sensor
boards are also available separately |
| M2000
and M2i spares |
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We
have a large inventory of M2000 and M2i spares including wafer handler
assemblies, dep station assemblies, controllers, Servos etc. If you have a
requirement for an M2000 or M2i part please give us a call.
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| Service
and support |
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Semicon
can provide on site Engineering support for Installations and commissioning,
machine downs, maintenance, upgrades and modifications. Maintenance contracts
can be provided to match customers exact requirements and wafer throughputs.
Using our team of experienced and dedicated Engineers we can swiftly respond to
your needs and optimise the performance of your Varian 3000 tools.
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| Training |
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Training
courses can be tailored to meet the customers exact needs. We can offer
anything from Operator training right through to a comprehensive Maintenance,
repair and troubleshooting course. Customers can choose to have the course on
site provided of course that a system is made available to use.
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